euv
- 网络极紫外光(Extreme Ultra Violet)；极紫外光刻；紫外线
euveuv
极紫外光(Extreme Ultra Violet)
...奈米以下技术节点下一世代微影技术的主要候选者，传统极紫外光(EUV)所搭配之光罩基板以低热膨胀系数材料(LTEM)为基材…
极紫外光刻
另：纳米压印技术与极紫外光刻(EUV),电子束直写(EBDW)和定向自组装(DSA)并称为下一代芯片光刻技术(NGL)的四大候选人…
紫外线
新技术如超紫外线（EUV）以及无掩膜电子束光刻技术目前还不够成熟，无法满足深纳米工艺的需求。193nm嵌入光刻技术将 …
远紫外
原本被看好的远紫外（EUV）光刻技术在迟迟难获实质进展之时，193 Immersion Lithography （浸没式光刻）技术似乎又成了 …
1
Nikon and rival ASML Holding NV are going toe-to-toe in lithography, but the two the companies have markedly different strategies.
尼康和ASML在高端光刻机领域是一对死对头，不过两家公司的EUV战略有着显著的不同之处。
2
An EUV Lithography mask, a fabrication method, and use method thereof is provided.
本发明提供了一种EUV光刻掩模、其制造方法与其使用方法。
3
We are greatly interested in the EUV brightenings observed by TRACE and SOHO in recent years.
近年来TRACE卫星和SOHO卫星观测到的EUV增亮事件引起了人们的极大兴趣。
4
Wavelength calibration of EUV and soft X-ray monochromator measured by hollow cathode source
用空心阴极光源标定极紫外-软X射线单色仪
5
Analysis of the reflective performance of EUV multilayer under the influence of capping layer
帽层对极紫外多层膜反射特性影响分析
6
Platform for Measuring the Reflectivity of EUV Multiplayer Films
一种用于极紫外多层膜反射率测量的平台
7
The Experiment Study on the Resolution of Electro-Optical Imaging System at EUV Wave Band
EUV波段电光成像系统分辨率的实验研究
8
Testing system for performance of EUV solar telescope
极紫外太阳望远镜成像质量检测系统设计